Engineers, scientists, and researchers utilize the simulation program COMSOL Multiphysics to precisely simulate the real world and investigate a variety of physical phenomena in their models. The main purpose of this work was to study the designing and optimization of electrostatic microelectromechanical systems (MEMS) switch in COMSOL Multiphysics and the feasibility study of the electrostatic switches to come up with its higher performance, controlled actuation by using different materials. The objectives of this study are: To investigate various materials for performance of MEMS switches and to design a switch beam structure for performance. As we analyzed the results, we observed mode shapes and mode of vibrations with respect to stress analysis and Eigen frequency, displacement with respect to voltage for three different materials such as Silicon, SiN₃ and SiO₂. We observed that output parameters of Si are higher as compared to the SiN₃ and SiO₂. Si material has higher electrical and capacitive response as compared to the other two materials.